Chotest VT6200, VT6300 Confocal Microscope

Ngày đăng: 02/35/2026 - 1 lượt xem

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Hotline: 0365930441

details

Features

1. High precision and high repeatability
  1. 1) Based on the rotating confocal optical system, combined with high stability structural design and excellent 3D reconstruction algorithm, the measurement system is jointly composed to ensure thehigh measurement accuracy of the instrument.
  2. 2) The unique shock isolation design can reduce the vibration noise of the bottom surface, the instrument is stable and reliable in most environments, and has good measurement repeatability
2. All-in-one operation of measurement analysis software
  1. 1) The measurement and analysis are operated on the same interface without switching, and the measurement data is automatically counted, realizing the function of rapid batch measurement
  2. 2) The visualization window is convenient for users to observe the scanning process in real time
  3. 3) Combined with the automatic measurement function of the custom analysis template, the multi-region measurement and analysis can be automatically completed
  4. 4) Five functional modules of geometric analysis, roughness analysis, structural analysis, frequency analysis and functional analysis.
  5. 5) One-key analysis, multi-file analysis, free combination analysis items are saved as analysis templates, one-key analysis of batch samples, and data analysis and statistical chart functions are provided
  6. 6) More than 300 kinds of 2D and 3D parameters can be measured according to ISO/ASME/EUR/GBT
3. Precision joystick

The joystick integrated with the displacement adjustment functions in the three directions of X, Y, and Z can quickly complete the pre-measurement works such as stage translation and 2-way focusing etc.

4. Double anti-collision protection measures

In addition to the software ZSTOP setting the lower limit of the Z-direction displacement for anti-collision protection, a mechanical and electronic sensor is designed on the Z-axis. When the lens touches the surface of the sample, the instrument automatically enters an emergency stop state to protect the instrument to the greatest extent and reduce the risk of human operation

Features

V-shaped groove

 
Trench

 
Pyramid shape

Laser hole

 
Patterned Wafer

 
Microlens matrix

Taper hole

 
Optical lens

 
Ddiamond drill

Conductive ceramics

 
Paper fiber

 
Ultra-precision metal tip

PCB

 
Gold plated micro-holes

 
Grid line of solar plate

Model No. VT6200
Size 720×580×1500mm
Weight 400kg
Principle Spinning disk confocal optical system
Objective Lens 10X,50X(Optional: 5X, 20X,50X,100X APO)
Field of View 120×120 μm~2.4×2.4 mm
Step Height
Measurement
Repeatability(1σ) ≤12nm
Accuracy*1 ≤ ± (0.2+L/100) μm
Display Resolution 0.1nm
Width
Measurement
Repeatability(1σ) 40nm
Accuracy*2 ± 2%
Display Resolution 1nm
XY Object
Table
Size 230x230mm
Travel Range 200x200mm
Load Capacity 10kg
Control Method Motorized
Z-Axis Travel Range 100mm
Control Method Motorized
Lens Turret Motorized 5 holes turret
Light Source White LED
Operating
Environment
Power Supply AC100~240V, 50/60Hz, Power 120W
Working Temp. 15℃~30℃, fluctuation < 2℃/60min
Humidity 5%~95%RH, no condensation
Vibration VC-C or better
Other No strong magnetic field, no corrosive gas

Note:
*1 Measure standard 5 μm steps height block by 50X Objective lens in a laboratory environment
*2 Measure standard engraved line block by 50X Objective lens in a laboratory environment