High performance and cost-effective type
Wide range inductance sensor for contour
Roughness measurement without nosepiece
High accuracy, small range for contour and micro precision measurement
Wide range measurement for roughness
Multifunctional type for wide range roughness and precise contour measurement
One detector for both profile and roughness, only need to replace the stylus to change the measuring functions.
|
Specification |
Parameters |
|
Measuring range |
X axis |
0~220mm |
|
Z axis |
0~620mm |
|
Z1 axis |
C:±7.5mm/R:±600μm |
|
Profile detector linear precision |
≤0.07%f.s. |
|
Roughness detector linear precision |
≤±(10nm + 3.5%) |